Measurement Uncertainty of White-Light Interferometry on Optically Rough Surfaces
نویسنده
چکیده
A Michelson interferometer is illuminated by a broadband light source (e.g. light-emitting diode, superluminescent diode, arc or incandescent lamp). At the output of the interferometer, a CCD camera is used as a multiple detector. The measured object is placed in one arm of the interferometer and moved in the longitudinal direction as indicated by the arrow in Fig. 1. The surface of the object is imaged by a telecentric optical system onto the lightsensitive area of the CCD camera. During the moving of the object in the longitudinal direction, a series of images is acquired. From the acquired series, the coherence function (also referred to as correlogram or interferogram) can be extracted for each object point. The maximum of the Measurement Uncertainty of White-Light Interferometry on Optically Rough Surfaces 22
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